JAMP  Vol.8 No.2 , February 2020
Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings
Abstract: Periodic Nanostructured anti-reflection coatings (NALs) are a promising option for enhancing transmission of coherent light without inducing scattering. We’ve found that reducing the height of NALs below a critical value to enhance mechanical stability can highly reduce the transmission efficiency. Here, using Rigorous Couples Wave Analysis (RCWA), we find the minimum height for over 99% transmission and effect of height on transmission bandwidth. Then, during a one-step plasma etching, two samples with different heights have been generated and their efficiency is evaluated using RCWA.
Cite this paper: Mousavi, B. , Busani, T. , Zadeh, M. and Brueck, S. (2020) Enhancing Mechanical Stability of Nano-Structured Anti-Reflection Coatings. Journal of Applied Mathematics and Physics, 8, 247-258. doi: 10.4236/jamp.2020.82020.

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