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 MSA  Vol.9 No.10 , September 2018
Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Chromium Doped Zinc Oxide Thin Film for Gas Sensing Applications
Abstract: Chromium (Cr) doped Zinc oxide ZnO thin films were deposited onto glass substrates by Metal Organic Chemical Vapour Deposition (MOCVD) technique with varying dopant concentration at a temperature of 420°C. The effect of the chromium concentration on morphological, structural, optical, electrical and gas sensing properties of the films were investigated. The scanning electron microscopy results revealed that the Cr concentration has great influence on the crystallinity, surface smoothness and grain size. X-ray diffraction (XRD) studies shows that films were polycrystalline in nature and grown as a hexagonal wurtzite structure. A direct optical band energy gap of 3.32 to 3.10 eV was obtained from the optical measurements. The transmission was found to decrease with increasing Cr doping concentration. Rutherford Backscattering Spectroscopy (RBS) analysis also demonstrates that Cr ions are substitutionally incorporated into ZnO. I-V characteristic of the film shows a resistivity ranges from 1.134 × 10-2 · cm to 1.24 × 10-2 · cm at room temperature. The gas sensing response of the films were enhanced with incorporation of Cr as a dopant with optimum operating temperature around 200°C.
Cite this paper: Akinwunmi, O. , Akinwumi, O. , Ogundeji, J. and Famojuro, A. (2018) Synthesis and Characterization of Metal Organic Chemical Vapour Deposited Chromium Doped Zinc Oxide Thin Film for Gas Sensing Applications. Materials Sciences and Applications, 9, 844-857. doi: 10.4236/msa.2018.910061.
References

[1]   Shinde, V.R., Gujar, T.P. and Lokhande, C.D. (2007) LPG Sensing Properties of ZnO Films Prepared by Spray Pyrolysis Method: Effect of Molarity of Precursor Solution. Journal of Sensors and Actuators B: Chemical, 120, 551-559.
https://doi.org/10.1016/j.snb.2006.03.007

[2]   Look, D.C. (2001) Recent Advances in ZnO Materials and Devices. Materials Science and Engineering B, 80, 383-387.
https://doi.org/10.1016/S0921-5107(00)00604-8

[3]   Jin, W., Lee, I.-K., Kompch, A., Dorfler, U. and Winterer, M. (2007) Chemical Vapor Synthesis and Characterization of Chromium Doped Zinc Oxide Nanoparticles. Journal of European Ceramic Society, 27, 4333-4337.
https://doi.org/10.1016/j.jeurceramsoc.2007.02.152

[4]   Arshak, K., Corcoran, J. and Korostynska, O. (2007) Gamma Radiation Sensing Properties of TiO2, ZnO, CuO and CdO Thick Film pn-Junctions. Journal of Sensors and Actuators A: Physical, 123-124, 194-198.
https://doi.org/10.1016/j.sna.2005.01.014

[5]   Arora, A., Dwivedi, V.K., George, P.J., Sreenivas, K. and Gupta, V. (2008) Zinc Oxide Thin Film Based MEMS Acoustic Sensor with Tunnel for Pressure. Sensors and Actuators A: Physical, 141, 256.

[6]   Granqvist, C.G. (2017) Transparent Conductors as Solar Energy Materials: A Panoramic Review. Solar Energy Materials and Solar Cell, 91, 1529-1598.
https://doi.org/10.1016/j.solmat.2007.04.031

[7]   Sun, M., Zhang, Q.F. and Wu, J.L. (2007) Electrical and Electroluminescence Properties of As-Doped p-Type ZnO Nanorod Arrays. Journal of Physics D: Applied Physics, 40, 3798-3802.
https://doi.org/10.1088/0022-3727/40/12/036

[8]   Xu, C.K., Chun, J., Kim, D.E., Kim, J.J., Chon, B. and Joo, T. (2007) Electrical Properties and near Band Edge Emission of Bi-Doped ZnO Nanowires. Applied Physics Letters, 90, Article ID: 083113.

[9]   Zhang, H., Yang, D., Ma, X., Du, N., Wu, J. and Que, D. (2006) Straight and Thin ZnO Nanorods: Hectogram-Scale Synthesis at Low Temperature and Cathodoluminescence. Journal of Physical Chemistry B, 110, 827-830.
https://doi.org/10.1021/jp055351k

[10]   Senthilkumaar, S., Rajendran, K., Banerjee, S., Chini, T.K. and Sengodan, V. (2008) Influence of Mn Doping on the Microstructure and Optical Property of ZnO. Materials Science in Semiconductor Processing, 11, 6-12.
https://doi.org/10.1016/j.mssp.2008.04.005

[11]   Liu, Y., Yang, J.H., Guan, Q.F., Yang, L.L., Zhang, Y.J., Wang, Y.X., Feng, B., Cao, J., Liu, X.Y., Yang, Y.T. and Wei, M.B. (2009) Effects of Cr-Doping on the Optical and Magnetic Properties in ZnO Nanoparticles Prepared by sol-Gel Method. Journal of Alloys and Compounds, 486, 835-838.

[12]   de la L. Olvera, M., Maldonado, A., Asomoza, R. and Mele’ndez-Lira, M. (2000) Chemical Stability of Doped ZnO Thin Films. Journal of Materials Science: Materials in Electronics, 11, 1-5.
https://doi.org/10.1023/A:1008973800554

[13]   Ramani, R.V., Ramani, B.M., Saparia, A.D., Savaliya, C., Rathod, K.N. and Markna, J.H. (2016) Cr-ZnO Nanostructured Thin Film Coating on Borosilicate Glass by Cost Effective Sol-Gel Dip Coating Method. Ain Shams Engineering Journal.

[14]   Elanchezhiyan, J., Bhuvana, K.P., Gopalakrishnan, N., Chang, Y., Sivananthan, S., Senthil Kumar, M. and Balasubramanian, T. (2009) Realization of Room Temperature Ferromagnetism in Zn1-xCrxO Thin Films Grown by RF Magnetron Sputtering. Journal of Alloys and Compounds, 468, 7-10.

[15]   Hu, Y.M., Chen, Y.T., Zhong, Z.X., Yu, C.C. and Wang, C.R. (2008) The Morphology and Optical Properties of Cr-Doped ZnO Films Grown Using the Magnetron Co-Sputtering Method. Applied Surface Science, 254, 3873-3878.

[16]   Shinoda, M., Nishide, T., Sawada, Y., Hosaka, M. and Matsumoto, T. (1993) Stability of Sputter Deposited Chromium-Doped Zinc Oxide (ZnO) Films against Acids. Japanese Journal of Applied Physics, Part 2: Letters, 32, L1565-L1567.
https://doi.org/10.1143/JJAP.32.L1565

[17]   Satoh, I. and Kobayashi, T. (2003) Magnetic and Optical Properties of Novel Magnetic Semiconductor Cr-Doped ZnO and Its Application to All Oxide p-i-n Diode. Journal of Applied Surface Science, 216, 603-606.

[18]   Iqbal, A., Mahmood, A., Khan, T.M. and Ahmed, E. (2013) Structural and Optical Properties of Cr Doped ZnO Crystalline Thin Films Deposited by Reactive Electron Beam Evaporation Technique. Progress in Natural Science: Materials International, 23, 64-69.
https://doi.org/10.1016/j.pnsc.2013.01.010

[19]   Aguilar-Leyva, J., Maldonado, A. and de la Olvera, M.L. (2007) Gas-Sensing Characteristics of Undoped-SnO2 Thin Films and Ag/SnO2 and SnO2/Ag Structures in a Propane Atmosphere. Materials Characterization, 58, 740-744.
https://doi.org/10.1016/j.matchar.2006.11.016

[20]   Maldonado, A., Mallen-Hernandez, S.A., Vega-Perez, J., de la Olvera, M.L. and Tirado-Guerra, S. (2009) Chromium Doped Zinc Oxide Thin Films Deposited by Chemical Spray Used in Photo-Catalysis and Gas Sensing. Revista Mexicana de Fisica, 55, 90-94.

[21]   Khoza, P.B., Moloto, M.J. and Sikhwivhilu, L.M. (2012) The Effect of Solvents, Acetone, Water, and Ethanol, on the Morphological and Optical Properties of ZnO Nanoparticles Prepared by Microwave. Journal of Nanotechnology, 2012, Article ID: 195106.

[22]   Lucio-Lopez, M.A., Luna-Arias, M.A., Maldonado, A. and de la Olvera, M.L. (2006) Chromium Doped Zinc Oxide Thin Films Deposited by Chemical Spray Used in Photo-Catalysis and Gas Sensing. Revista Mexicana de Fisica, 55, 90-94.

[23]   Jayaraman, V.K., álvarez, A.M., Bizarro, M., Koudriavtsev, Y. and de la Luz Olvera Amador, M. (2017) Effect of Precursor Type and Doping Concentration on the Physical Properties of Ultrasonically Sprayed Aluminium and Indium Co-Doped Zinc Oxide Thin Films. Thin Solid Films, 642, 14-19.
https://doi.org/10.1016/j.tsf.2017.09.012

[24]   Fitzgerald, C.B., Venkatesan, M., Lunney, J.G., Dorneles, L.S. and Coey, J.M.D. (2005) Cobalt-Doped ZnO—A Room Temperature Dilute Magnetic Semiconductor. Applied Surface Science, 247, 493-496.
https://doi.org/10.1016/j.apsusc.2005.01.043

[25]   Bylsma, R.B., Becker, W.M., Kossut, J., Debska, U. and Yoder-Short, D. (1986) Dependence of Energy Gap on x and T in Zn1-xMnxSe: The Role of Exchange Interaction. Physical Review B, 33, 8207-8215.
https://doi.org/10.1103/PhysRevB.33.8207

[26]   Lee, Y.R., Ramdas, A.K. and Aggarwal, R.L. (1988) Energy Gap, Excitonic, and ‘‘Internal’’ Mn2+ Optical Transition in Mn-Based II-VI Diluted Magnetic Semiconductors. Physical Review B, Condensed Matter, 38, 10600-10610.

[27]   Gomez, H., Maldonado, A., Casatanedoperez, R., Torres-Delgado, G., de La, M. and Olvera, L. (2007) Properties of Al-Doped ZnO Thin Films Deposited by a Chemical Spray Process. Materials Characterization, 58, 708-714.
https://doi.org/10.1016/j.matchar.2006.11.012

 
 
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