MSA  Vol.9 No.9 , August 2018
Tribological Behavior of Binary B-C Films Deposited by Sputtering-PBII Hybrid System
Abstract: In this article, the authors report on the use of Radio Frequency (RF) Magnetron Sputtering combined with Plasma-Based Ion Implantation (PBII) technique to synthesize the Boron-Carbon (B-C) films. High purity of boron carbide (99.5%) disk was used as a target with an RF power of 300 W. The mixtures of Argon (Ar)-Methane (CH4) ware used as reactive gas under varying CH4 partial flow pressure at the specified range of 0 - 0.15 Pa and fixed total gas pressure and total gas flow at 0.30 Pa and 30 sccm, respectively. The effect of CH4 flow ratio on the friction coefficient of B-C films was studied. The friction coefficient of the film depended on the concentration of B. When it was 10% or lower, the coefficient decreased to 0.2 or lower. In this concentration range of B, the specific wear rate also decreased to the order of 10-7 mm3/Nm, and excellent wear resistance was displayed.
Cite this paper: Chin, H. , Yoshida, S. and Watanabe, S. (2018) Tribological Behavior of Binary B-C Films Deposited by Sputtering-PBII Hybrid System. Materials Sciences and Applications, 9, 723-731. doi: 10.4236/msa.2018.99052.

[1]   Ahmad, A.A., Ianno, N.J., Hwang, S.-D. and Dowben, P.A. (1998) Sputter Deposition of High Resistivity Boron Carbide. Thin Solid Films, 335, 174-177.

[2]   Lousa, A., Martinez, E., Esteve, J. and Pascual, E. (1998) Effects of Ion Bombardment on the Properties of B4C Thin Films Deposited by RF Sputtering. Thin Solid Films, 355/356, 210-213.

[3]   Lee, K.W. and Harris, S.J. (1998) Boron Carbide Film Grown from Microwave Plasma Chemical Vapor Deposition. Diamond and Related Materials, 7, 1539-1543.

[4]   Hu, T., Steihl, L., Rafaniello, W., Fawcett, T., Hawn, D.D., Mashall, J.G., Rozeveld, S.J., Putzig, C.L., Blackson, J.H., Cermignani, W. and Robinson, M.G. (1998) Structures and Properties of Disordered Boron Carbide Coatings Generated by Magnetron Sputtering. Thin Solid Films, 332, 80-86.

[5]   Pascual, E., Martinez, E., Esteve, J. and Lousa, A. (1999) Boron Carbide Thin Films Deposited by Tuned-Substrate RF Magnetron Sputtering. Diamond and Related Materials, 8, 402-405.

[6]   Li, S., Zeng, B., Feng, Z., Liu, Y. and Zhang, L. (2010) Effects of Heat Treatment on the Microstructure of Amorphous Boron Carbide Coating Deposited on Graphite Substrates by Chemical vapor Deposition. Thin Solid Films, 519, 251-258.

[7]   Bao, R. and Chrisey, D.B. (2010) Chemical States of Carbon in Amorphous Boron Carbide Thin Films Deposited by Radio Frequency Magnetron Sputtering. Thin Solid Films, 519, 164-168.

[8]   Castillo, H.A., Restrepo-Pasrra, E., Velez, J.M. and de la Cruz, W. (2011) Substrate Temperature Influence on Boron Carbide Coatings Grown by the PLD Technique. Surface and Coatings Technology, 205, 3607-3612.

[9]   Zhang, L.L., Yang, Q., Tang, Y., Yang, L. and Cui, X. (2015) Synthesis and Characterization of Boron Incorporated Diamond-Like Carbon Thin Films. Thin Solid Films, 589, 457-464.

[10]   Eckardt, T., Bewilogua, K., van der Kolk, G., Hurkmans, T., Trinh, T. and Fleischer, W. (2000) Improving Tribological Properties of Sputtered Boron Carbide Coatings by Process Modifications. Surface and Coatings Technology, 126, 69-75.

[11]   Cuong, P.D., Ahn, H.-S., Yoon, E.-S. and Shin, K.-H. (2006) Effects of Relative Humidity on Tribological Properties of Boron Carbide Coating against Steel. Surface and Coatings Technology, 201, 4230-4235.

[12]   Jagannadham, K., Watkins, T.R., Lance, M.J., Riester, L. and Lemaster, R.L. (2006) Laser Physical Vapor Deposition of Boron Carbide Films to Enhance Cutting Tool Performance. Surface and Coatings Technol, 201, 4230.

[13]   Qian, J.C., Yan, C., Zhang, W.J., Li, D.J., Martinu, L., Klemberg-Sapieha, J.E., Zhou, Z.F., Li, K.Y., Descartes, S., Chromik, R. and Bello, I. (2015) Tailoring the Mechanical and Tribological Properties of Sputtered Boron Carbide Films via the B1-Cx Composition. Surface and Coatings Technology, 267, 2.

[14]   Bhowmick, S., Sun, G. and Alpas, A.T. (2016) Low Friction Behavior of Boron Carbide Coatings Sliding against Ti-6Al-4V. Surface and Coatings Technology, 308, 316-327.

[15]   Rao, P.N., Gupta, R.K., Saravanan, K., Bose, A. and Rai, S.K. (2018) Investigation of Composition of Boron Carbide Thin Films by Resonant Soft X-Ray Reflectivity. Surface and Coatings Technology, 334, 536-542.