Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor

Kai  Yang; Zhigang  Li; Liwei  Shang; Weidong  Yi

doi:10.4236/jemaa.2011.311069

Kai Yang, Zhigang Li, Liwei Shang, Weidong Yi

Abstract: In order to realize the micromation of position sensors, and extend the application area into micro scale, this paper designs a novel micro position sensor, Mace SAW (Surface Acoustic Wave) position sensor, which can be fabricated with MEMS technology. Its key components are IDTs (Interdigital Transducers) and reflective grooves. The structure and working principles of the sensor are introduced theoretically, and the manufacture process is then put forward.

Keywords: SAW, Position Sensor, Reflective Grooves

Cite this paper: nullK. Yang, Z. Li, L. Shang and W. Yi, "Design and Analysis of a Novel Surface Acoustic Wave Micro Position Sensor," Journal of Electromagnetic Analysis and Applications, Vol. 3 No. 11, 2011, pp. 439-442. doi: 10.4236/jemaa.2011.311069.

References

[1] M. Rahal and A. Demosthenous, “An Integrated Signal Conditioner for High-Frequency Inductive Position Sensors,” Measurement Science Technology, Vol. 21, No. 1, 2010, p. 015203. doi:10.1088/0957-0233/21/1/015203

[2] R. N. Aguilar and G. C. M. Meijer, “Fast Interface Electronics for a Resistive Touch Screen,” Proceedings of IEEE Sensors, Orlando, 12-14 June 2002, pp. 1360-1363. doi:10.1109/ICSENS.2002.1037318

[3] S. P. Hotelling, J. A. Strickon and B. Q. Huppi, “Multipoint Touchscreen,” US Patent No. 7663607, 2010.

[4] S. P. Hotelling and B. R. Land, “Double-Sided Touch- Sensitive Panel with Shield and Drive Combined Layer,” US Patent No. 7920129, 2011.

[5] S. P. Hotelling, C. H. Krah and B. Q. Huppi, “Multipoint Touch Surface Controller,” US Patent No. 20090315851, 2009.

[6] R. W. Doering, “Infrared Touch Panel,” US Patent 4868912, 1989.

[7] R. Adler and P. J. Desmares, “An Economical Touch Panel Using SAW Absorption,” IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, Vol. 34, No. 2, 1987, pp. 195-201. doi:10.1109/T-UFFC.1987.26932

[8] H. M. J. R. Soemers and D. M. Brouwer, “Mechatronics and Micro Systems,” Mechatronic Systems 2004: A Proceedings Volume from the 3rd IFAC Symposium, Sydney, 6-8 September 2004, pp. 6-8.

[9] R. R. Gulati, “Modern Television Practice Principles, Te- chnology and Servicing,” 2nd Edition, New Age International Publishers, New Delhi, 2002.

[10] Y. Liu, J.-P. Nikolovski, M. Hafez, N. Mechbal and M. Verge, “Acoustic Wave Approach for Multi-Touch Tactile Sensing,” International Symposium on Micro-NanoMecha- tronics and Human Science (MHS), Nagoya, 9-11 November 2009, pp. 574-579. doi:10.1109/MHS.2009.5351748

[11] M. Reynolds, A. Mazalek and G. Davenport, “An Acoustic Position Sensing System for Large Scale Interactive Displays,” Proceedings of IEEE Sensors, Atlanta, 28-31 October 2007, pp. 1193-1196. doi:10.1109/ICSENS.2007.4388622

[12] J. Kent, M. Takeuchi and G. Laux, “Robert Adler’s Touchscreen Inventions,” IEEE International Ultrasonics Symposium, New York, 28-31 October 2007, pp. 9-20.

[13] D. P. Morgan, “Surface-wave devices for signal processing,” Elsevier, Amsterdam, 1985.

[14] J. Melngailis, R. C. Williamson, J. Holtham and R. C. M. Li, “Design of Reflective Array Surface Wave Devices,” Wave Electronics, Vol. 2, 1976, pp. 177-198.