MSA  Vol.9 No.1 , January 2018
Extended Anode Effect for Tube Inner Coating of Non-Conductive Ceramics by Pulsed Coaxial Magnetron Plasma
Abstract: For uniform tube inner coating of non-conductive thin films, the double-ended coaxial magnetron pulsed plasma (DCMPP) method was investigated. In this study, coating of TiN and TiO2 was performed. It was clearly shown that the extended anode effect was strongly influenced by the electric resistance of the coated thin films on the inner surface of an insulator tube. Additionally, high frequency (100 kHz) was better for relatively high plasma density. On the other hand, in the case of titanium oxide deposition, negative ion productions drastically decrease the deposition rate and the shifting velocity of plasma main position for coated TiO2 films.
Cite this paper: Gasab, M. , Sugawara, H. , Sakata, K. and Fujiyama, H. (2018) Extended Anode Effect for Tube Inner Coating of Non-Conductive Ceramics by Pulsed Coaxial Magnetron Plasma. Materials Sciences and Applications, 9, 1-10. doi: 10.4236/msa.2018.91001.

[1]   Ohta, H., Inoue, K., Yamada, Y., Yoshida, S., Fujiyama, H. and Ishikura, S. (1995) Microgravity Flow Boiling in a Transparent Tube. Proceedings of the 4th ASME-JSME Thermal Engineering Joint Conference, 19-24 March 1995, Lahina, Hawaii, 547.

[2]   Sheward, J.A. (1992) The Coating of Internal Surfaces by PVD Techniques. Metallurgical Coatings and Thin Films, 297-302.

[3]   Hytry, R., Moller, W., Wilhelm, R. and Keudell, A.V. (1993) Moving Coil Wave Guide Discharge for Inner Coating of Metal Tubes. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 11, 2508.

[4]   Ensinger, W. (1996) An Apparatus for Sputter Coating the Inner Walls of Tubes. Review of Scientific Instruments, 67, 318.

[5]   Ensinger, W. (1996) Corrosion and Wear Protection of Tube Inner Walls by Ion Beam Sputter Coating. Surface and Coatings Technology, 86/87, 438-442.

[6]   Schumacher, A., Frech, G. and Wolf, G.K. (1997) A Novel Method for Inside-Coating of Tubes and Hollow Cylinders by Ion Beam Sputtering 1. Surface and Coatings Technology, 89, 258-261.

[7]   Fujiyama, H., Tokitu, Y., Uchikawa, Y., Kuwahara, K., Miyake, K., Kuwahara, K. and Doi, A. (1998) Ceramics Inner Coating of Narrow Tubes by a Coaxial Magnetron Pulsed Plasma. Surface and Coatings Technology, 98, 1467-1472.

[8]   Uchikawa, Y., Sugimoto, S., Kuwahara, K., Fujiyama, H. and Kuwahara, H. (1999) Titanium Coating of the Inner of a 1 m Long Narrow Tube by Double-Ended Anode Coaxial Magnetron-Pulsed Plasmas. Surface and Coatings Technology, 112, 185-188.

[9]   Xue, D., Chen, Y., Ling, G., Liu, K., Chen, C. and Zhang, G. (2015) Preparation of Aluminide Coatings on the Inner Surface of Tubes by Heat Treatment of Al Coatings Electrodeposited from an Ionic Liquid. Fusion Engineering and Design, 101, 128-133.

[10]   Ueda, M., Silva, C., Santos, N.M. and Souza, G.B. (2017) Plasma Immersion Ion Implantation (and Deposition) inside Metallic Tubes of Different Dimensions and Configurations. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 409, 202-208.

[11]   Sugimoto, S., Uchikawa, Y., Kuwahara, K., Fujiyama, H. and Kuwahara, H. (1999) Extended Anode Effect in Coaxial Magnetron Pulsed Plasmas for Coating the Inside Surface of Narrow Tubes. Japanese Journal of Applied Physics, 38, 4342.