WJNSE  Vol.1 No.3 , September 2011
Analysis of Cr Atoms Three-Dimensional Deposition Characteristics
ABSTRACT
The semi-classical model is used to simulate the three-dimensional trajectory and deposition distribution of the chromium atoms in the Gaussian laser standing wave field using the Runge-Kutta method, and then the three-dimensional deposition stripes are also given, besides, the effects of atomic beam divergence, chromatic aberration and spherical aberration on deposition structure are also analyzed.

Cite this paper
nullH. Yang, W. Zhang and J. Yang, "Analysis of Cr Atoms Three-Dimensional Deposition Characteristics," World Journal of Nano Science and Engineering, Vol. 1 No. 3, 2011, pp. 73-78. doi: 10.4236/wjnse.2011.13011.
References
[1]   T. B. Li, “Nanometrology and Transfer Standard,” Shanghai Measurement and Testing, Vol. 185, No. 1, 2005, pp. 8-13.

[2]   J. J. McClelland, R. E. Scholten, E. C. Palm, et al., “Laser-Focused Atomic Deposition,” Science, Vol. 262, No. 5135, 1993, pp. 877-880. doi:10.1126/science.262.5135.877

[3]   J. J. McClelland, R. Gupta, R. J. Celotta and G. A. Porkolab, “Nanostructure Fabrication by Reactive-Ion Etching of Laser-Focused Chromium on Silicon,” Applied Physics B, Vol. 66, No. 1, 1998, pp. 95-98. doi:10.1007/s003400050361

[4]   J. J. McClelland, W. R. Anderson, C. C. Bradley, et al., “Accuracy of Nanoscale Pitch Standards Fabricated by Laser-Focused Atomic Deposition,” Journal of Research of the National Institute of Standards and Technology, Vol. 108, No. 2, 2003, pp. 99-113.

[5]   J. J. McClelland, “Atom Optical Properties of a Standing-Wave Light Field,” Journal of the Optical Society of America B, Vol. 12, No. 10, 1995, pp. 1761-1768.

[6]   B. Ma, Y. Ma, M. Zhao, S.-S. Ma and Z.-S. Wang, “Simulation of Sodium Atom Deposition Pattern in a Laser Standing Wave Field,” Acta Physica Sinica, Vol. 55, 2006, pp. 668-672.

[7]   W. T. Zhang, “The Research of Laser Collimation and Deposition of Chromium Atomic Beam,” Tongji University, 2008.

[8]   B. H. Zhu, “The Research of Interaction and Deposition for Chromium Atoms in Laser Field,” Guangxi Normal University, 2008.

[9]   J. J. McClelland, “Atom Optical Properties of a Standing-Wave Light Field,” Journal of the Optical Society of America B, Vol. 12, No. 10, 1995, pp. 1761-1768. doi:10.1364/JOSAB.12.001761

 
 
Top