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 MSA  Vol.8 No.1 , January 2017
Formation and Gas Barrier Characteristics of Polysilazane-Derived Silica Coatings Formed by Excimer Light Irradiation on PET Films with Vacuum Evaporated Silica Coatings
Abstract: The effects of excimer light irradiation on polysilazane coatings formed on PET films with vacuum-evaporated SiO2 coatings and the effects of these coatings on gas barrier characteristics have been investigated. The temperature during light irradiation has a large effect on the coating’s molecular structure and gas barrier characteristics. When irradiation was performed at 100, the polysilazane coating transformed into a silica coating, and a compact silica coating at a much lower temperature than with heat treatment alone was produced. Surface irregularities in the vapor-deposited silica coating were smoothed out by the formation of a polysilazane coating, which was transformed into a compact silica coating when irradiated with light, resulting in a significant improvement in the gas barrier characteristics. The water vapor permeability of the thin coating irradiated with excimer light at 100 showed only 0.04 g/m2•day (40, 90% RH). According to the results of investigation of temperature variation of water-vapor permeability, it is inferred that the developed film has an excellent gas barrier value, namely, 4.90 × 104 g/m2•day at 25. This gas barrier coated PET film is transparent and flexible, and can be used in the fabrication of flexible electronics. Also, the proposed fabrication method effectively provides a simple low-cost and low-temperature fabrication technique without the need for high vacuum facility.
Cite this paper: Ohishi, T. and Yamazaki, Y. (2017) Formation and Gas Barrier Characteristics of Polysilazane-Derived Silica Coatings Formed by Excimer Light Irradiation on PET Films with Vacuum Evaporated Silica Coatings. Materials Sciences and Applications, 8, 1-14. doi: 10.4236/msa.2017.81001.
References

[1]   White, M.S., Kaitenbrunner, M.G., Istrokowacki, E.D., Gutnichenko, K., Kettlgruber, G., Graz, I., Aazou, S., Ulbricht, C., Egbe, D.A.M., Miron, M.C., Major, Z., Schaber, M.C., Sekitani, T., Someya, T., Bauer, S. and Sariciftci, N.S. (2013) Ultrathin Highly Flexible and Stretchable PLEDs. Nature Photonics, 7, 811-816.
https://doi.org/10.1038/nphoton.2013.188

[2]   Sekitani, T. and Someya, T. (2011) Human-Friendly Organic Integrated Circuit. Materials Today, 14, 398-407.
https://doi.org/10.1016/S1369-7021(11)70184-5

[3]   Sekitani, T., Zschieschang, U., Klauk, H. and Someya, T. (2010) Flexible Organic Transistor and Circuits with Extreme Bending Stability. Nature Materials, 9, 1015-1022.
https://doi.org/10.1038/nmat2896

[4]   Nomura, K., Ohta, H., Kamiya, T., Hirano, M. and Hosono, H. (2004) Room-Temperature Fabrication of Transparent Flexible Thin-Film Transistors Using Amorphous Oxide Semiconductors. Nature, 432, 488-492.
https://doi.org/10.1038/nature03090

[5]   Wong, W.S. and Salleo, A. (2009) Flexible Electronics: Materials and Applications. Springer, New York.
https://doi.org/10.1007/978-0-387-74363-9

[6]   Sekitani, T. and Someya, T. (2010) Stretchable Large-Area Organic Electronics. Advanced Materials, 22, 2228-2246.
https://doi.org/10.1002/adma.200904054

[7]   Carcia, P.F., Mclean, R.S., Groner, M.D., Dameron, A.A. and George, S.M. (2009) Gas Diffusion Ultrabarriers on Polymer Substrates Using Al2O3 Atomic Layer Deposition and SiN Plasma-Enhanced Chemical Vapor Deposition. Journal of Applied Physics, 106, 023533.
https://doi.org/10.1063/1.3159639

[8]   Yagi, Y. and Akashi, K. (2007) Passivation Films on Organic Film Substrates Designed for Organic Electroluminescence Device. Journal of Vacuum Society of Japan, 50, 735.
https://doi.org/10.3131/jvsj.50.735

[9]   Hanada, T., Negishi, T., Shiroishi, I. and Shiro, T. (2010) Plastic Substrate with Gas Barrierlayer and Transparent Conductive Oxide Thin Film for Flexible Displays. Thin Solid Films, 518, 3089.
https://doi.org/10.1016/j.tsf.2009.09.166

[10]   Hata, T. and Nakayama, H. (2008) An Organic Catalytic CVD: Principle, Apparatus and Applications. Thin Solid Films, 516, 558.
https://doi.org/10.1016/j.tsf.2007.06.093

[11]   Carcia, P.F., MacLean, R.S., Reilly, M.H., Groner, M.D. and George, S.M. (2006) Catalyst of Al2O3 Gas Diffusion Barriers Grown by Atomic Layer Deposition on Polymer. Applied Physics Letters, 89, Article ID: 031915.
https://doi.org/10.1063/1.2221912

[12]   Dameron, A.A., Davidson, S.D., Burton, B.B., Carcia, P.F., MacLean, R.S. and George, S.M. (2008) Gas Diffusion Barriers on Polymer Using Multi Layers Fabricated by Al2O3 and Rapid SiO2 Atomic Layer Deposition. Journal of Physical Chemistry C, 112, 4573-4580.
https://doi.org/10.1021/jp076866+

[13]   Brinker, C.J. and Schere, G.W. (1990) Sol-Gel Science. Academic Press, Boston.

[14]   Seyferth, D. and Wiseman, G.H. (1984) High-Yield Synthesis of Si3N4/SiC Ceramic Materials by Pyrolysis of a Novel Polyorganosilazane. Journal of American Ceramic Society, 67, C132-C133.
https://doi.org/10.1111/j.1151-2916.1984.tb19620.x

[15]   Kamiya, K., Oka, A.I., Nasu, H. and Hashimoto, T. (2000) Comparative Study of Structure of Silica Gels from Different Sources. Journal of Sol-Gel Science & Technology, 19, 495-499.
https://doi.org/10.1023/A:1008720118475

[16]   Iwamoto, Y., Sato, K., Kato, T., Inada, T. and Kubo, Y. (2005) A Hydrogen-Perselective Amorphous Silica Membrane Derived from Polysilazane. Journal of European Ceramic Society, 25, 257-264.
https://doi.org/10.1016/j.jeurceramsoc.2004.08.007

[17]   Funayama, O., Tshiro, Y., Kamo, A., Okumura, M. and Isoda, T. (1994) Conversion Mechanism of Perhydropolysilazane into Silicon Nitride-Base Ceramics. Journal of Material Science, 29, 4883-4888.
https://doi.org/10.1007/BF00356538

[18]   Ohishi, T. (2003) Gas Barrier Characteristics of a Polysilazane Film Formed on an ITO-Coated PET Substrate. Journal of Non-Crystalline Solids, 330, 248-251.
https://doi.org/10.1016/j.jnoncrysol.2003.09.022

[19]   Naganuma, Y., Tanaka, S., Kato, C. and Shindo, T. (2004) Formation of Silica Coating from Perhydropolysilazane Using Vacuum Ultraviolet Excimer Lamp. Journal of the Ceramic Society of Japan, 112, 599-603.
https://doi.org/10.2109/jcersj.112.599

[20]   Prager, L., Dierdorf, G., Liebe, H., Naumov, S., Stojanovic’, S., Heller, R., Wennrich, L. and Buchmeiser, M.R. (2007) Conversion of Perhydropolysilazane into a SiOx Network Triggered by Vacuum Ultraviolet Irradiation: Access to Flexible, Transparent Barrier Coatings. Chemistry—A European Journal, 13, 8522-8529.
https://doi.org/10.1002/chem.200700351

[21]   Kobayashi, Y., Yokota, H., Fuchita, Y., Takahashi, A. and Sugawara, Y. (2013) Characterization of Gas Barrier Silica Coating Prepared from Perhydropolysilazane Films by Vacuum Ultraviolet Irradiation. Journal-Ceramic Society Japan, 121, 215-218.
https://doi.org/10.2109/jcersj2.121.215

[22]   Morlier, A., Cros, S., Garandet, J.-P. and Alberola, N. (2012) Thin Gas-Barrier Silica Layers from Perhydropolisilazane Obtained through Low Temperature Curing: A Comparative Study. Thin Solid Films, 524, 62-66.
https://doi.org/10.1016/j.tsf.2012.09.065

[23]   Naganuma, Y., Horiuchi, T., Kato, C. and Tanaka, S. (2013) Low-Temperature Synthesis of Silica Coating on a Poly(Ethylene Terephthalate) Film from Perhydropolysilazane Using Vacuum Ultraviolet Light Irradiation. Surface & Coatings Technology, 225, 40-46.
https://doi.org/10.1016/j.surfcoat.2013.03.014

[24]   Morlier, A., Cros, S., Garandet, J.-P. and Alberola, N. (2013) Gas Barrier Properties of Solution Processed Composite Multilayer Structures for Organic Solar Cells Encapsulation. Solar Energy Materials and Solar Cells, 115, 93-99.
https://doi.org/10.1016/j.solmat.2013.03.033

[25]   Morlier, A., Cros, S., Garandet, J.-P. and Alberola, N. (2014) Structural Properties of Ultraviolet Cured Polysilazane Gas Barrier Layers on Polymer Substrates. Thin Solid Films, 550, 85-89.
https://doi.org/10.1016/j.tsf.2013.10.140

[26]   Blankenburg, L. and Schrodner, M. (2015) Perhydropolysilazane Derived Silica for Flexible Transparent Barrier Foils Using a Reel-to-Reel Wet Coating Technique: Single- and Multilayer Structures. Surface & Coatings Technology, 275, 193-206.
https://doi.org/10.1016/j.surfcoat.2015.05.019

[27]   Ohishi, T., Sone, S. and Yanagida, K. (2014) Preparation and Gas Barrier Characteristics of Polysilazane-Derived Silica Thin Films Using Ultraviolet Irradiation. Materials Sciences and Applications, 5, 105-111.
https://doi.org/10.4236/msa.2014.53015

[28]   Ohishi, T., Yamazaki, Y. and Nabatame, T. (2016) Preparation, Structure and Gas Barrier Characteristics of Polysilazane-Derived Silica Thin Film Formed on PET by Simultaneously Applying Ultraviolet-Irradiation and Heat-Treatment. Frontiers in Nanoscience and Nanotechnology, 2, 149-154.

[29]   Ohishi, T. and Yanagida, K. (2016) Preparation and Gas Barrier Characteristics of Polysilazane-Derived Multi-Layered Silica Thin Films Formed on Alycyclic Polyimide Film Using Ultraviolet Irradiation. Frontiers in Nanoscience and Nanotechnology, 2, 173-178.
https://doi.org/10.15761/FNN.1000131

 
 
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