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 JAMP  Vol.4 No.8 , August 2016
Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma
Abstract:
TiO2-like polymer films were synthesized by inductively coupled plasma in pulsed radio-frequency (RF) modes. The plasma chemistry, studied by optical emission spectroscopy, showed that the ra- dicals and fragments formed in the discharge were dependent on the precursor, and that the species density in the plasma gas is as a function of flux de gas that is used to carry the monomer into the plasma reactors.
Cite this paper: Li, Z. , Li, X. , Liu, G. , Pireaux, J. , Houssiau, L. and Bonifaci, N. (2016) Optical Spectroscopic Investigation of TiO2-Like Polymerization Processes by Inductively Coupled Plasma. Journal of Applied Mathematics and Physics, 4, 1528-1532. doi: 10.4236/jamp.2016.48162.
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