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 OALibJ  Vol.2 No.12 , December 2015
Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering
Abstract: We prepared Cr2O3-Ta2O5 composite films using our RF magnetron co-sputtering method for the first time. X-ray diffraction (XRD) patterns and photoluminescence (PL) spectra of the films annealed at 700℃, 800℃, 900℃, and 1000℃ were evaluated. From their XRD patterns, the Cr2O3-Ta2O5 film annealed at 700℃ seemed to be almost amorphous, and the one annealed at 800℃ seemed to be hexagonal Ta2O5 doped with Cr. In addition, the Cr2O3-Ta2O5 films annealed at 900℃ and 1000℃ seemed to include tetragonal CrTaO4 phases. Furthermore, it seems that almost no defect exists in our Cr2O3-Ta2O5 composite films annealed at 700℃ - 1000℃ because their PL spectra have no defect-related peak. We thus find that good-quality Cr2O3-Ta2O5 composite films including CrTaO4 can be obtained using our very simple co-sputtering method and subsequent annealing above 900℃.
Cite this paper: Miura, K. , Osawa, T. , Yokota, Y. and Hanaizumi, O. (2015) Preparation of Cr2O3-Ta2O5 Composites Using RF Magnetron Sputtering. Open Access Library Journal, 2, 1-5. doi: 10.4236/oalib.1102094.
References

[1]   Cid, M., Stem, N., Brunetti, C., Beloto, A.F. and Ramos, C.A.S. (1998) Improvements in Anti-Reflection Coatings for High-Efficiency Silicon Solar Cells. Surface and Coatings Technology, 106, 117-120.
http://dx.doi.org/10.1016/S0257-8972(98)00499-X

[2]   Hanaizumi, O., Miura, K., Saito, M., Sato, T., Kawakami, S., Kuramochi, E. and Oku, S. (2000) Frontiers Related with Automatic Shaping of Photonic Crystals. IEICE Transactions on Electronics, E83-C, 912-919.

[3]   Sato, T., Miura, K., Ishino, N., Ohtera, Y., Tamamura, T. and Kawakami, S. (2002) Photonic Crystals for the Visible Range Fabricated by Autocloning Technique and Their Application. Optical and Quantum Electronics, 34, 63-70.
http://dx.doi.org/10.1023/A:1013382711983

[4]   Sanada, T., Wakai, Y., Nakashita, H., Matsumoto, T., Yogi, C., Ikeda, S., Wada, N. and Kojima, K. (2010) Preparationof Eu3+-Doped Ta2O5 Phosphor Particles by Sol-Gel Method. Optical Materials, 33, 164-169.
http://dx.doi.org/10.1016/j.optmat.2010.08.018

[5]   Singh, M.K., Fusegi, G., Kano, K., Bange, J.P., Miura, K. and Hanaizumi, O. (2009) Intense Photoluminescence from Erbium-Doped Tantalum Oxide Thin Films Deposited by Sputtering. IEICE Electronics Express, 6, 1676-1682.
http://dx.doi.org/10.1587/elex.6.1676

[6]   Bange, J.P., Singh, M.K., Kano, K., Miura, K. and Hanaizumi, O. (2011) Structural Analysis of RF Sputtered Er Doped Ta2O5 Films. Key Engineering Materials, 459, 32-37.
http://dx.doi.org/10.4028/www.scientific.net/KEM.459.32

[7]   Miura, K., Arai, Y., Osawa, T. and Hanaizumi, O. (2012) Light-Emission Properties of Europium-Doped Tantalum-Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering. Journal of Light & Visual Environment, 36, 64-67.
http://dx.doi.org/10.2150/jlve.36.64

[8]   Singh, M.K., Miura, K., Fusegi, G., Kano, K. and Hanaizumi, O. (2013) Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Key Engineering Materials, 534, 154-157.
http://dx.doi.org/10.4028/www.scientific.net/KEM.534.154

[9]   Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2014) Fabrication of Tm-Doped Ta2O5 Thin Films Using a Co-Sputtering Method. Results in Physics, 4, 148-149.
http://dx.doi.org/10.1016/j.rinp.2014.08.011

[10]   Miura, K., Osawa, T., Yokota, Y. and Hanaizumi, O. (2014) Fabrication and Evaluation of Ta2O5:Y2O3 Co-Sputtered Thin Films. Results in Physics, 4, 185-186.
http://dx.doi.org/10.1016/j.rinp.2014.09.004

[11]   Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Yellow Light Emission from Ta2O5:Er, Eu, Ce Thin Films Deposited Using a Simple Co-Sputtering Method. Results in Physics, 5, 26-27.
http://dx.doi.org/10.1016/j.rinp.2014.11.003

[12]   Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Fabrication and Evaluation of Green-Light Emitting Ta2O5:Er, Ce Co-Sputtered Thin Films. Results in Physics, 5, 78-79.
http://dx.doi.org/10.1016/j.rinp.2015.02.002

[13]   Miura, K., Kano, K., Arai, Y. and Hanaizumi, O. (2015) Preparation of Light-Emitting Ytterbium-Doped Tantalum-Oxide Thin Films Using a Simple Co-Sputtering Method. Materials Sciences and Applications, 6, 209-213.
http://dx.doi.org/10.4236/msa.2015.62024

[14]   Miura, K., Arai, Y., Kano, K. and Hanaizumi, O. (2015) Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 343-347.
http://dx.doi.org/10.4236/msa.2015.65039

[15]   Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Thulium and Cerium Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 263-268.
http://dx.doi.org/10.4236/msa.2015.64031

[16]   Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Materials Sciences and Applications, 6, 656-660.
http://dx.doi.org/10.4236/msa.2015.67067

[17]   Miura, K., Arai, Y. and Hanaizumi, O. (2015) Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering. Materials Sciences and Applications, 6, 676-680.
http://dx.doi.org/10.4236/msa.2015.67069

[18]   Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Europium and Cerium Co-Doped Tantalum-Oxide Thin Films Prepared Using Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 30-34.
http://dx.doi.org/10.4236/msce.2015.38005

[19]   Miura, K., Osawa, T., Yokota, Y., Hossain, Z. and Hanaizumi, O. (2015) Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 47-51.
http://dx.doi.org/10.4236/msce.2015.39006

[20]   Korotcenkov, G., Han, S.H. and Cho, B.K. (2013) Material Design for Metal Oxide Chemiresistive Gas Sensors. Journal of Sensor Science and Technology, 22, 1-17.
http://dx.doi.org/10.5369/JSST.2013.22.1.1

[21]   Yamaga, M., Henderson, B., O’Donnell, K.P., Trager Cowan, C. and Marshall, A. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals I. Applied Physic B, 50, 425-431.
http://dx.doi.org/10.1007/BF00325096

[22]   Yamaga, M., Henderson, B., O’Donnell, K.P. and Yue, G. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals II. The Case of YGG. Applied Physic B, 51, 132-136.

[23]   Schlottig, F., Schreckenbach, J. and Marx, G. (1999) Preparation and Characterisation of Chromium and Sodium Tantalate Layers by Anodic Spark Deposition. Fresenius’ Journal of Analytical Chemistry, 363, 209-211.
http://dx.doi.org/10.1007/s002160051174

[24]   Cid, M., Stem, N., Brunetti, C., Beloto, A.F. and Ramos, C.A.S. (1998) Improvements in Anti-Reflection Coatings for High-Efficiency Silicon Solar Cells. Surface and Coatings Technology, 106, 117-120.
http://dx.doi.org/10.1016/S0257-8972(98)00499-X

[25]   Hanaizumi, O., Miura, K., Saito, M., Sato, T., Kawakami, S., Kuramochi, E. and Oku, S. (2000) Frontiers Related with Automatic Shaping of Photonic Crystals. IEICE Transactions on Electronics, E83-C, 912-919.

[26]   Sato, T., Miura, K., Ishino, N., Ohtera, Y., Tamamura, T. and Kawakami, S. (2002) Photonic Crystals for the Visible Range Fabricated by Autocloning Technique and Their Application. Optical and Quantum Electronics, 34, 63-70.
http://dx.doi.org/10.1023/A:1013382711983

[27]   Sanada, T., Wakai, Y., Nakashita, H., Matsumoto, T., Yogi, C., Ikeda, S., Wada, N. and Kojima, K. (2010) Preparationof Eu3+-Doped Ta2O5 Phosphor Particles by Sol-Gel Method. Optical Materials, 33, 164-169.
http://dx.doi.org/10.1016/j.optmat.2010.08.018

[28]   Singh, M.K., Fusegi, G., Kano, K., Bange, J.P., Miura, K. and Hanaizumi, O. (2009) Intense Photoluminescence from Erbium-Doped Tantalum Oxide Thin Films Deposited by Sputtering. IEICE Electronics Express, 6, 1676-1682.
http://dx.doi.org/10.1587/elex.6.1676

[29]   Bange, J.P., Singh, M.K., Kano, K., Miura, K. and Hanaizumi, O. (2011) Structural Analysis of RF Sputtered Er Doped Ta2O5 Films. Key Engineering Materials, 459, 32-37.
http://dx.doi.org/10.4028/www.scientific.net/KEM.459.32

[30]   Miura, K., Arai, Y., Osawa, T. and Hanaizumi, O. (2012) Light-Emission Properties of Europium-Doped Tantalum-Oxide Thin Films Deposited by Radio-Frequency Magnetron Sputtering. Journal of Light & Visual Environment, 36, 64-67.
http://dx.doi.org/10.2150/jlve.36.64

[31]   Singh, M.K., Miura, K., Fusegi, G., Kano, K. and Hanaizumi, O. (2013) Visible-Light Emission Properties of Erbium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Key Engineering Materials, 534, 154-157.
http://dx.doi.org/10.4028/www.scientific.net/KEM.534.154

[32]   Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2014) Fabrication of Tm-Doped Ta2O5 Thin Films Using a Co-Sputtering Method. Results in Physics, 4, 148-149.
http://dx.doi.org/10.1016/j.rinp.2014.08.011

[33]   Miura, K., Osawa, T., Yokota, Y. and Hanaizumi, O. (2014) Fabrication and Evaluation of Ta2O5:Y2O3 Co-Sputtered Thin Films. Results in Physics, 4, 185-186.
http://dx.doi.org/10.1016/j.rinp.2014.09.004

[34]   Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Yellow Light Emission from Ta2O5:Er, Eu, Ce Thin Films Deposited Using a Simple Co-Sputtering Method. Results in Physics, 5, 26-27.
http://dx.doi.org/10.1016/j.rinp.2014.11.003

[35]   Miura, K., Osawa, T., Suzuki, T., Yokota, Y. and Hanaizumi, O. (2015) Fabrication and Evaluation of Green-Light Emitting Ta2O5:Er, Ce Co-Sputtered Thin Films. Results in Physics, 5, 78-79.
http://dx.doi.org/10.1016/j.rinp.2015.02.002

[36]   Miura, K., Kano, K., Arai, Y. and Hanaizumi, O. (2015) Preparation of Light-Emitting Ytterbium-Doped Tantalum-Oxide Thin Films Using a Simple Co-Sputtering Method. Materials Sciences and Applications, 6, 209-213.
http://dx.doi.org/10.4236/msa.2015.62024

[37]   Miura, K., Arai, Y., Kano, K. and Hanaizumi, O. (2015) Fabrication of Erbium and Ytterbium Co-Doped Tantalum-Oxide Thin Films Using Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 343-347.
http://dx.doi.org/10.4236/msa.2015.65039

[38]   Miura, K., Osawa, T., Yokota, Y., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Thulium and Cerium Co-Doped Tantalum-Oxide Films Prepared by Radio-Frequency Co-Sputtering. Materials Sciences and Applications, 6, 263-268.
http://dx.doi.org/10.4236/msa.2015.64031

[39]   Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Observation of Violet-Light Emission Band for Thulium-Doped Tantalum-Oxide Films Produced by Co-Sputtering. Materials Sciences and Applications, 6, 656-660.
http://dx.doi.org/10.4236/msa.2015.67067

[40]   Miura, K., Arai, Y. and Hanaizumi, O. (2015) Observation of Blue-Light Emission Band from Eu-Doped Ta2O5 Thin Films Prepared Using Co-Sputtering. Materials Sciences and Applications, 6, 676-680.
http://dx.doi.org/10.4236/msa.2015.67069

[41]   Miura, K., Suzuki, T. and Hanaizumi, O. (2015) Photoluminescence Properties of Europium and Cerium Co-Doped Tantalum-Oxide Thin Films Prepared Using Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 30-34.
http://dx.doi.org/10.4236/msce.2015.38005

[42]   Miura, K., Osawa, T., Yokota, Y., Hossain, Z. and Hanaizumi, O. (2015) Preparation of CuO-Ta2O5 Composites Using a Simple Co-Sputtering Method. Journal of Materials Science and Chemical Engineering, 3, 47-51.
http://dx.doi.org/10.4236/msce.2015.39006

[43]   Korotcenkov, G., Han, S.H. and Cho, B.K. (2013) Material Design for Metal Oxide Chemiresistive Gas Sensors. Journal of Sensor Science and Technology, 22, 1-17.
http://dx.doi.org/10.5369/JSST.2013.22.1.1

[44]   Yamaga, M., Henderson, B., O’Donnell, K.P., Trager Cowan, C. and Marshall, A. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals I. Applied Physic B, 50, 425-431.
http://dx.doi.org/10.1007/BF00325096

[45]   Yamaga, M., Henderson, B., O’Donnell, K.P. and Yue, G. (1990) Temperature Dependence of the Lifetime of Cr3+ Luminescence in Garnet Crystals II. The Case of YGG. Applied Physic B, 51, 132-136.

[46]   Schlottig, F., Schreckenbach, J. and Marx, G. (1999) Preparation and Characterisation of Chromium and Sodium Tantalate Layers by Anodic Spark Deposition. Fresenius’ Journal of Analytical Chemistry, 363, 209-211.
http://dx.doi.org/10.1007/s002160051174

 
 
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