ENG  Vol.1 No.2 , August 2009
Fabrication of Si-PDMS Low Voltage Capillary Electrophoresis Chip
Abstract: This paper discusses the fabrication of Si-PDMS low voltage capillary electrophoresis chip (CE chip). Arrayed-electrode which is used to apply low separation voltage is fabricated along the sidewalls of the separation channel on the silicon based bottom part. Isolation trenches, which are placed surrounding the arrayed-electrode, insure the insulation between the arrayed-electrode, as well as arrayed-electrode and liquid in the micro channel. Polydimethylsilicone (PDMS) is used as the cover. PDMS and silicon based bottom part are reversible sealed to attain Si-PDMS low voltage CE chip. Experiments have been done to obtain optimum electrophoresis separation condition: separation voltage is 45V, switch time is 2s and the Phe and Lys electrophoresis separation is successful.
Cite this paper: nullW. GU, Z. WEN, Z. WEN, Y. XU, F. LIANG and X. HU, "Fabrication of Si-PDMS Low Voltage Capillary Electrophoresis Chip," Engineering, Vol. 1 No. 2, 2009, pp. 111-116. doi: 10.4236/eng.2009.12013.

[1]   A. Manz, N. Graber, and H. M. Widmer, “Miniaturized total chemical analysis systems: A novel concept for chemical sensing,” Sensors and Actuators B, Vol. 7, pp. 244-248, 1990.

[2]   N. A. Lacher, K. E. Garrison, and R. S. Martin, “Microchip capillary electrophoresis/electro-chemistry,” Electrophoresis, Vol. 22, pp. 2526-2536, 2001.

[3]   Y. Jin, G. A. Luo, and R. J. Wang, “Development of integrated capillary electrophoresis chips,” Chinese Journal of Chromatography, Vol. 4, pp. 313-317, 2000.

[4]   C. Koppmu and A. D. Manz, “Development in technology and application of microsystems,” Current Opinion in Chemical Biology, Vol. 1, pp. 410-419, 1997.

[5]   J. C. Fister, S. C. Jacobson, and J. M. Ramsey, “Ultrasensitive crosscorrelation electrophoresis on microchip devices, Analytical Chemistry, Vol. 71, pp. 4460-4464, 1999.

[6]   J. Qian, Y. Wu, H. Yang, A. C. Michael, “An integrated decoupler for capillary electrophoresis with electrochemical detection: Application to analysis of brain microdialy- sate,” Analytical Chemistry, Vol. 71, pp. 4486-4492, 1999.

[7]   Y. Shi, P. C. Simpon, J. R. Scherer, and D. Wexler, “Radial capillary array electrophoresis microplate and scanner for high-performance nucleic acid analysis,” Analytical Chemistry, Vol. 71, pp. 5354-5361, 1999.

[8]   J. Wang, M. P. Chatrathi, B. Tian, and R. Polsky, “Micro- fabricated electrophoresis chips for simultaneous bioassays of glucose, uric acid, ascorbic acid, and acetaminophen,” Analytical Chemistry, Vol. 72, pp. 2514-2518, 2000.

[9]   Y. C. Lin and W. D. Wu, “Arrayed-electrode design for moving electric field driven capillary electrophoresis chips,” Sensors and Actuators B, Vol. 73, pp. 54-62, 2001.

[10]   L. M. Fu and R. J. Yang, “Low-voltage driven control in electrophoresis microchips by traveling electric field,” Electrophoresis, Vol. 24, pp. 1253-1260, 2003.

[11]   X. Li, Z. Y. Wen, and H. X. Li, “Low voltage separation model and its control system for electrophoresis chip,” Micronanoelectronic Technology, Vol. 7/8, pp. 344-346, 2003.

[12]   Y. Wu, Z. Y. Wen, and Z. P. Jiang, “Low voltage separation model and discussion for electrophoresis chip,” Opto-Electronic Engineering, Vol. 29, pp. 27-33, 2002.

[13]   Z. Y. Wen, Y. Xu, and X. Li, “Electric field simulation of separation mode on low voltage electrophoresis chip,” Optoelectronic Engineering, Vol. 9, pp. 35-41, 2006.

[14]   Y. Xu, Z. Y. Wen, and X. Li, “Fluidic field simulation of separation mode on low voltage electrophoresis chip by ConventerWare,” Chinese Journal of Sensors and Actuators, Vol. 8, pp. 1070-1075, 2007.

[15]   Z. Y. Zhang, S. L. Xu, and Y. K. Liu, “A Study on silicon deep etching technology,” Microelectronics, Vol. 2, pp. 519-521, 2004.

[16]   Y. Wu, Y. Q. Jiang, and Z. Y. Wen, “Development of polycrystalline silicon micro-electrode array on silicon substrate,” Semiconductor Optoelectronics, Vol. 4, pp. 317-319, 2005.