Properties of Titanium Oxynitride Prepared by RF Plasma
Author(s)
Fayez M. El-Hossary,
Niemat Z. Negm,
Ahmed M. Abd El-Rahman,
Mohamed Raaif,
Alzahraa A. Abd Elmula
ABSTRACT
Titanium oxynitrides combine the properties of metallic oxides and nitrides. In this presentation, titanium was oxynitrided using inductively coupled RF plasma in a gas mixture containing 80% N2 and 20% O2. The effect of plasma-processing power from 350 up to 550 W on microstructure, mechanical, tribological, wettability and electrochemical properties of the oxynitrided titanium was examined using different characterizations and testing techniques. The results demonstrated the formation of TiO, TiO2 rutile phase, TiNxOy and Ti2N as a result of plasma oxynitriding. The micro-hardness of the oxynitrided layers increases up to 766 HV0.1 as the plasma-processing power increases up to 550 W. The wear and corrosion resistance are improved for oxynitrided titanium in comparison with untreated samples. Moreover, the friction coefficient decreases from nearly 0.75 for the pure titanium to nearly 0.3 for oxynitrided titanium. The obtained data show an increase of surface energy and wettability of titanium oxynitride as the plasma power increases. The formation of hard oxide and oxynitride phases and the transformation of TiO2 from anatase to rutile structure at relatively high temperature are the main reasons for the good physical and electrochemical properties of titanium oxynitride.
Titanium oxynitrides combine the properties of metallic oxides and nitrides. In this presentation, titanium was oxynitrided using inductively coupled RF plasma in a gas mixture containing 80% N2 and 20% O2. The effect of plasma-processing power from 350 up to 550 W on microstructure, mechanical, tribological, wettability and electrochemical properties of the oxynitrided titanium was examined using different characterizations and testing techniques. The results demonstrated the formation of TiO, TiO2 rutile phase, TiNxOy and Ti2N as a result of plasma oxynitriding. The micro-hardness of the oxynitrided layers increases up to 766 HV0.1 as the plasma-processing power increases up to 550 W. The wear and corrosion resistance are improved for oxynitrided titanium in comparison with untreated samples. Moreover, the friction coefficient decreases from nearly 0.75 for the pure titanium to nearly 0.3 for oxynitrided titanium. The obtained data show an increase of surface energy and wettability of titanium oxynitride as the plasma power increases. The formation of hard oxide and oxynitride phases and the transformation of TiO2 from anatase to rutile structure at relatively high temperature are the main reasons for the good physical and electrochemical properties of titanium oxynitride.
Cite this paper
El-Hossary, F. , Negm, N. , Abd El-Rahman, A. , Raaif, M. and Abd Elmula, A. (2015) Properties of Titanium Oxynitride Prepared by RF Plasma. Advances in Chemical Engineering and Science, 5, 1-14. doi: 10.4236/aces.2015.51001.
El-Hossary, F. , Negm, N. , Abd El-Rahman, A. , Raaif, M. and Abd Elmula, A. (2015) Properties of Titanium Oxynitride Prepared by RF Plasma. Advances in Chemical Engineering and Science, 5, 1-14. doi: 10.4236/aces.2015.51001.
References
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http://dx.doi.org/10.1111/j.1151-2916.1967.tb15013.x [25] Abboud, J.H. (2013) Effect of Processing Parameters on Titanium Nitrided Surface Layers Produced by Laser Gas Nitriding. Surface & Coatings Technology, 214, 19-29.
http://dx.doi.org/10.1016/j.surfcoat.2012.10.059 [26] Thomann, A.L., Basillais, A., Wegscheider, M., Boulmer-Leborgne, C., Pereira, A., Delaporte, P., Sentis, M. and Sauvage, T. (2004) Chemical and Structural Modifications of Laser Treated Iron Surfaces: Investigation of Laser Processing Parameters. Applied Surface Science, 230, 350-363.
http://dx.doi.org/10.1016/j.apsusc.2004.02.060 [27] Yaskiv, O.I., Pohrelyuk, I.M., Fedirko, V.M., Lee, D.B. and Tkachuk, O.V. (2011) Formation of Oxynitrides on Titanium Alloys by Gas Diffusion Treatment. Thin Solid Films, 519, 6508-6514.
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http://dx.doi.org/10.1016/S0039-6028(01)01809-X [37] Baier, R.E., Shafrin, E.G. and Zisman, W.A. (1968) Adhesion: Mechanisms That Assist or Impede It. Science, 162, 1360-1368.
http://dx.doi.org/10.1126/science.162.3860.1360 [38] Yin, H.Y., Jin, Z.S., Zhang, S.L., Wang, S.B. and Zhang, Z.J. (2002) Reason for the Loss of Hydrophilicity of TiO2 Film and Its Photocatalytic Regeneration. Science in China Series B: Chemistry, 45, 625-632.
[1] Huang, P., Wang, F., Xu, K. and Han, Y. (2007) Mechanical Properties of Titania Prepared by Plasma Electrolytic Oxidation at Different Voltages. Surface and Coatings Technology, 201, 5168-5171.
http://dx.doi.org/10.1016/j.surfcoat.2006.07.137 [2] Chen, F., Zhou, H., Chen, C. and Xia, Y.J. (2009) Study on the Tribological Performance of Ceramic Coatings on Titanium Alloy Surfaces Obtained through Microarc Oxidation. Progress in Organic Coatings, 64, 264-267.
http://dx.doi.org/10.1016/j.porgcoat.2008.08.034 [3] Yerokhin, A.L., Niea, X., Leyland, A. and Matthews, A. (2000) Characterization of Oxide Films Produced by Plasma Electrolytic Oxidation of a Ti-6Al-4V Alloy. Surface & Coating Technology, 130, 195-206.
http://dx.doi.org/10.1016/S0257-8972(00)00719-2 [4] Wanga, Y., Jiang, B., Lei, T. and Guo, L. (2004) Dependence of Growth Features of Microarc Oxidation Coatings of Titanium Alloy on Control Modes of Alternate Pulse. Materials Letters, 58, 1907-1911.
http://dx.doi.org/10.1016/j.matlet.2003.11.026 [5] Budinsky, K.G. (1991) Tribological Properties of Titanium Alloys. Wear, 151, 203-217.
http://dx.doi.org/10.1016/0043-1648(91)90249-T [6] Tsyganov, I.A., Maitz, M.F., Richter, E., Reuther, H. and Mashina, A.I. (2007) Hemocompatibility of Titanium-Based Coatings Prepared by Metal Plasma Immersion Ion Implantation and Deposition. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 257, 122-127.
http://dx.doi.org/10.1016/j.nimb.2006.12.169 [7] Vaz, F., Cerqueira, P., Rebouta, L., Nascimento, S.M.C., Alves, E., Goudeau, Ph. and Riviere, J.P. (2003) Preparation of Magnetron Sputtered TiNxOy Thin Films. Surface and Coatings Technology, 174-175, 197-203.
http://dx.doi.org/10.1016/S0257-8972(03)00416-X [8] Venkataraj, S., Severin, D., Mohamed, S.H., Ngaruiya, J., Kappertz, O. and Wuttig, M. (2006) Towards Understanding the Superior Properties of Transition Metal Oxynitrides Prepared by Reactive DC Magnetron Sputtering. Thin Solid Films, 502, 228-234.
http://dx.doi.org/10.1016/j.tsf.2005.07.280 [9] Bloyce, A., Morton, P. and Bell, T. (1994) ASM Handbook, Vol. 5. ASM International, Materials Park, OH, 835. [10] Minkevich, A.N. (1965) Thermo-Chemical Treatment of Metals and Alloys. Mashinostroene Press, Moscow, 325. [11] Goldschmidt, H.J. (1967) Interstitial Alloys. Butterworths, London.
http://dx.doi.org/10.1007/978-1-4899-5880-8 [12] El-Hossary, F., Negm, N.Z., Khalil, S.M. and Abd Elrahman, A.M. (2002) Formation and Properties of a Carbonitrided Layer in 304 Stainless Steel Using Different Radio Frequency Plasma Powers. Thin Solid Film, 405, 179-185.
http://dx.doi.org/10.1016/S0040-6090(01)01729-1 [13] El-Hossary, F.M., Negm, N.Z., Abd El-Rahman, A.M. and Hammad, M. (2009) Duplex Treatment of 304 AISI Stainless Steel Using RF Plasma Nitriding and Carbonitriding. Materials Science and Engineering: C, 29, 1167-1173.
http://dx.doi.org/10.1016/j.msec.2008.09.049 [14] ASTM International (2011) ASTM Standard E384. West Conshohocken, PA, 19428-2959 USA. [15] Chappé, J.-M., Martin, N., Pierson, J.F., Terwagne, G., Lintymer, J., Gavoille, J. and Takadoum, J. (2004) Influence of Substrate Temperature on Titanium Oxynitride Thin Films Prepared by Reactive Sputtering. Applied Surface Science, 225, 29-38.
http://dx.doi.org/10.1016/j.apsusc.2003.09.028 [16] Wang, Q., Zhang, P.-Z., Wei, D.-B., Wang, R.-N., Chen, X.-H. and Wang, H.-Y. (2013) Microstructure and Corrosion Resistance of Pure Titanium Surface Modified by Double-Glow Plasma Surface Alloying. Material and Design, 49, 1042-1047.
http://dx.doi.org/10.1016/j.matdes.2013.02.054 [17] Rizzo, A., Signore, M.A., Mirenghi, L. and Di Luccio, T. (2009) Synthesis and Characterization of Titanium and Zirconium Oxynitride Coatings. Thin Solid Films, 517, 5956-5964. [18] Trenczek-Zajac, A., Radecka, M., Zakrzewska, K., Brudnik, A., Kusior, E., Bourgeois, S., Macro de Lucas, M.C. and Imhoff, L. (2009) Structural and Electrical Properties of Magnetron Sputtered Ti(ON) Thin Films: The Case of TiN Doped in Situ with Oxygen. Journal of Power Sources, 194, 93-103.
http://dx.doi.org/10.1016/j.jpowsour.2008.12.112 [19] Graciani, J., Hamad, S. and Sanz, J.F. (2009) Changing the Physical and Chemical Properties of Titanium Oxynitrides TiN1-xOx by Changing the Composition. Physical Review B, 80, Article ID: 184112.
http://dx.doi.org/10.1103/PhysRevB.80.184112 [20] Tsyganove, I., Maitz, M.F. and Wieser, E. (2004) Blood Compatibility of Titanium-Based Coatings Prepared by Metal Plasma Immersion Ion Implantation and Deposition. Applied Surface Science, 235, 156-163.
http://dx.doi.org/10.1016/j.apsusc.2004.05.134 [21] Williamson, G.K. and Hall, W.H. (1953) X-Ray Line Broadening from Filed Aluminium and Wolfram. Acta Metallurgica, 1, 22-31.
http://dx.doi.org/10.1016/0001-6160(53)90006-6 [22] Scherrer, P. (1918) Bestimmung der Grosse und der inneren Struktur von Kolloidteilchen mittels Rontgenstrahlen. Nachrichten von der Gesellschaft Wissensch. zu Gottingen, 26, 98-100. [23] Wilson, A.J.C. (1943) The Reflexion of X-Rays from the “Anti-Phase Nuclei” of AuCu$_{3}$. Proceedings of the Royal Society A: Mathematical, Physical and Engineering Sciences, 181, 360-368.
http://dx.doi.org/10.1098/rspa.1943.0013 [24] Navrotsky, A. and Kleppa, O.J. (2006) Enthalpy of the Anatase-Rutile Transformation. Journal of the American Ceramic Society, 50, 626-626.
http://dx.doi.org/10.1111/j.1151-2916.1967.tb15013.x [25] Abboud, J.H. (2013) Effect of Processing Parameters on Titanium Nitrided Surface Layers Produced by Laser Gas Nitriding. Surface & Coatings Technology, 214, 19-29.
http://dx.doi.org/10.1016/j.surfcoat.2012.10.059 [26] Thomann, A.L., Basillais, A., Wegscheider, M., Boulmer-Leborgne, C., Pereira, A., Delaporte, P., Sentis, M. and Sauvage, T. (2004) Chemical and Structural Modifications of Laser Treated Iron Surfaces: Investigation of Laser Processing Parameters. Applied Surface Science, 230, 350-363.
http://dx.doi.org/10.1016/j.apsusc.2004.02.060 [27] Yaskiv, O.I., Pohrelyuk, I.M., Fedirko, V.M., Lee, D.B. and Tkachuk, O.V. (2011) Formation of Oxynitrides on Titanium Alloys by Gas Diffusion Treatment. Thin Solid Films, 519, 6508-6514.
http://dx.doi.org/10.1016/j.tsf.2011.04.219 [28] Stratton, P. and Boodey, J. (2003) Case Hardening Titanium. Proceedings of the 1st ASM International Surface Engineering and the 13th IFHTSE Congress, ASM International, Materials Park, 22. [29] Kapczinski, M.P., Gil, C., Kinast, E.J. and Dos Santos, C.A. (2003) Surface Modification of Titanium by Plasma Nitriding. Materials Research, 6, 265-271.
http://dx.doi.org/10.1590/S1516-14392003000200023 [30] Rautray, T.R., Narayanan, R. and Kim, K.-H. (2011) Ion Implantation of Titanium Based Biomaterials. Progress in Materials Science, 56, 1137-1177.
http://dx.doi.org/10.1016/j.pmatsci.2011.03.002 [31] Pohrelyuk, I.M., Fedirko, V.M., Tkachuk, O.V. and Proskurnyak, R.V. (2013) Corrosion Resistance of Ti-6Al-4V Alloy with Nitride Coatings in Ringer’s Solution. Corrosion Resistance, 66, 392-398. [32] Davis, J.R. (2000) Corrosion: Understanding the Basics. ASM International, Materials Park. [33] Basame, S.B. and White, H.S. (2000) Pitting Corrosion of Titanium the Relationship between Pitting Potential and Competitive Anion Adsorption at the Oxide Film/Electrolyte Interface. Journal of the Electrochemical Society, 147, 1376-1381.
http://dx.doi.org/10.1149/1.1393364 [34] Habzaki, H., Shimizu, K., Skeldon, P., Thompson, G.E., Wood, G.C. and Zhou, X. (1997) Effects of Alloying Elements in Anodizing of Aluminium. Transactions of the Institute of Metal Finishing, 75, 18. [35] Zeng, L., Liu, K., Zhang, Y.-C., Yue, X.-J., Song, G.-Q. and Ba, D.-C. (2009) The Microstructure and Wettability of the TiOx Films Synthesized by Reactive DC Magnetron Sputtering. Materials Science and Engineering: B, 156, 79-83.
http://dx.doi.org/10.1016/j.mseb.2008.11.043 [36] Kasemo, B. (2002) Biological Surface Science. Surface Science, 500, 656-677.
http://dx.doi.org/10.1016/S0039-6028(01)01809-X [37] Baier, R.E., Shafrin, E.G. and Zisman, W.A. (1968) Adhesion: Mechanisms That Assist or Impede It. Science, 162, 1360-1368.
http://dx.doi.org/10.1126/science.162.3860.1360 [38] Yin, H.Y., Jin, Z.S., Zhang, S.L., Wang, S.B. and Zhang, Z.J. (2002) Reason for the Loss of Hydrophilicity of TiO2 Film and Its Photocatalytic Regeneration. Science in China Series B: Chemistry, 45, 625-632.