MSCE  Vol.2 No.11 , November 2014
Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method
Abstract: ZnO films were deposited on glass substrates by means of a metal organic decomposition (MOD) method. We investigated the effect of annealing temperature, time and the number of laminated layers on the film structure on the basis of X-ray diffraction measurements. We found the optimum conditions of the temperature and the time to be 600°C and 40 minutes for the preparation, respectively. In addition, the layer-by-layer forming was not found to degrade the film from viewpoint of X-ray line width.
Cite this paper: Ohmukai, M. , Nakagawa, T. , Kamano, M. and Uehara, N. (2014) Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method. Journal of Materials Science and Chemical Engineering, 2, 41-48. doi: 10.4236/msce.2014.211006.

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