The mechanical response of
shock-loaded microelectromechanical systems (MEMS) is simulated to formulate guidelines
for the design of dynamically reliable MEMS. MEMS are modeled as microstructures
supported on elastic substrates, and the shock loads are represented as pulses
of acceleration applied by the package on the substrate over a finite time
duration. For typical MEMS and shock loads, the response of the substrate is
closely approximated by rigid-body motion. Results indicate that modeling the shock
force as a quasi-static force for MEMS with low-natural frequencies may lead to
erroneous results. A criterion is obtained to distinguish between the dynamic and
quasi-static responses of the MEMS.
Cite this paper
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