Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge

Mohamed Ali  Hassouba; Ahmed Rida  Galaly; Usama Mohamed  Rashed

doi:10.4236/jmp.2014.58070

Mohamed Ali Hassouba, Ahmed Rida Galaly^*, Usama Mohamed Rashed

Abstract: Numerical calculations by using a self-consistent model of the collisional sheath for the capacitively coupled RF discharge are our target. The results indicated that, at high pressure, the ohmic heating is usually the dominant heating mechanism in the discharge. The power dissipated in the sheath is calculated and compared with the measured data. Moreover, we indicated that, when the gas pressure is increased, the calculated dissipated power is decreased also while the measured input RF power is increased. Furthermore the sheath thickness of the capacitively coupled discharge is calculated and in the same order of the electron oscillation amplitude in the RF field, while the ionization mean free path is shorter than it.

Keywords: RF-Discharge, Self-Consistent Model, Ohmic Heating

Cite this paper: Hassouba, M. , Galaly, A. and Rashed, U. (2014) Numerical Calculations of Some Plasma Parameters of the Capacitively Coupled RF Discharge. Journal of Modern Physics, 5, 591-598. doi: 10.4236/jmp.2014.58070.

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