Cite this paper
S. Sekatskii, M. Mensi, A. Mikhaylov and G. Dietler, "The Use of Light Diffracted from Grating Etched onto the Backside Surface of an Atomic Force Microscope Cantilever Increases the Force Sensitivity," Journal of Surface Engineered Materials and Advanced Technology
, Vol. 3 No. 4, 2013, pp. 29-35. doi: 10.4236/jsemat.2013.34A1004
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