Diamond-like carbon (DLC) is a metastable amorphous film that exhibits unique properties. However, many limitations exist regarding the use of DLC, for example, its tribological characteristics at high temperature, as well as its limited thermal stability. In this study, silicon/oxygen and silicon/nitrogen co-incorporated diamond-like carbon (Si-O-DLC and Si-N-DLC) films are studied, taking into account the thermal stability and tribological performance of these films compared with pure DLC. All the films were prepared on Si wafers, WC-Co materials, and aluminum foils using a plasma-based ion implantation (PBII) technique using acetylene (C2H2), tetramethylsilane (TMS, Si(CH3)4), oxygen (O2) and nitrogen (N2) as plasma sources. The structure of the films was characterized using Raman spectroscopy. The thermal stability of the films was measured using thermogravimetric and differential thermal analysis (TG-DTA). The friction coefficient of the films was assessed using ball-on-disk friction testing. The results indicate that Si-N-DLC films present better thermal stability due to the presence of Si-O networks in the films. The Si-N-DLC (23 at.%Si, 8 at.%N) film was affected using thermal annealing in an air atmosphere with increasing temperature until 500°C. The film can also resist thermal shock by cycling 10 times between the various temperatures and air atmosphere until 500°C. Further, Si-O-DLC and Si-N-DLC films exhibit excellent tribological performance, especially the Si-N-DLC (23 at.%Si, 8 at.%N) film, which exhibits excellent tribological performance at 500°C in an air atmosphere. It is concluded that Si-O-DLC and Si-N-DLC films improve upon the thermal stability and tribological performance of DLC.
 S.-J. Cho, J.-W. Chung and K.-R. Lee, “Characterization of the Mechanical Properties of Diamond-Like Carbon Films,” Diamond and Related Materials, Vol. 14, No. 8, 2005, pp. 1270-1276.
 J. Robertson, “Diamond-Like Amorphous Carbon,” Materials Science and Engineering Reports, Vol. 37, No. 4-6, 2002, pp. 129-281.
 R. A. Singh, E.-S. Yoon, H. J. Kim, H. Kong, S.-J. Park and K.-R. Lee, “Friction Behaviour of Diamond-Like Carbon Films with Varying Mechanical Properties,” Surface and Coatings Technology, Vol. 201, No. 7, 2006, pp. 4348-4351.
 C. M. Cotell and J. K. Hirvonen, “Effect of Ion Energy on the Mechanical Properties of Ion Beam Assisted Deposition (IBAD) Wear Resistant Coatings,” Surface and Coatings Technology, Vol. 81, No. 1, 1996, pp. 118-125.
 Y. Funada, K. Awazu, H. Yasui and T. Sugita, “Adhesion Strength of DLC Films on Glass with Mixing Layer Prepared by IBAD,” Surface and Coatings Technology, Vol. 128-129, 2000, pp. 308-312.
 M. Günther, I. Bialuch, S. Peter, K. Bewilogua and F. Richter, “High Rate Deposition of Hard a-C:H Films Using Microwave Excited Plasma Enhanced CVD,” Surface and Coatings Technology, Vol. 205, No. S2, 2011, pp. S94-S98. http://dx.doi.org/10.1016/j.surfcoat.2010.12.047
 M. Ikeyama, S. Miyagawa, Y. Miyagawa, Y. Hayakawa and T. Miyajima, “DLC Coatings on Inner Walls of PET Bottles by a Simplified PBII Technique,” Surface and Coatings Technology, Vol. 201, No. 19-20, 2007, pp. 8112-8115.
 J. X. Liao, Z. Tian, J. Xu, L. Jin and H. G. Yang, “The Effect of H2/C2H2 Ratio on the Structure and Tribological Properties of Carbon Thin Films Prepared by PBII,” Surface and Coatings Technology, Vol. 201, No. 6, 2006, pp. 2871-2877.
 J. Noshiro, S. Watanabe, T. Sakurai and S. Miyake, “Friction Properties of Co-Sputtered Sulfide/DLC Solid Lubricating Films,” Surface and Coatings Technology, Vol. 200, No. 20-21, 2006, pp. 5849-5854.
 A. Pardo and C. Gómez-Aleixandre, “Metal Incorporation Strategies in DLC (Fullerene-Like) Thin Films Grown by ECR-CVD,” Vacuum, Vol. 85, No. 12, 2011, pp. 1140-1143. http://dx.doi.org/10.1016/j.vacuum.2011.03.001
 S. S. Camargo Jr., A. L. Baia Neto, R. A. Santos, F. L. Freire Jr., R. Carius and F. Finger, “Improved HighTemperature Stability of Si Incorporated a-C:H Films,” Diamond and Related Materials, Vol. 7, No. 8, 1998, pp. 1155-1162.
 A. L. Baia Neto, R. A. Santos, F. L. Freire Jr., S. S. Camargo Jr., R. Carius, F. Finger and W. Beyer, “Relation between Mechanical and Structural Properties of Silicon-Incorporated Hard a-C:H Films,” Thin Solid Films, Vol. 293, No. 1-2, 1997, pp. 206-211.
 K. Oguri and T. Arai, “Friction Coefficient of Si-C, Ti-C and Ge-C Coatings with Excess Carbon Formed by Plasma-Assisted Chemical Vapour Deposition,” Thin Solid Films, Vol. 208, No. 2, 1992, pp. 158-160.
 V. F. Dorfman, “Diamond-like nanocomposites (DLN),” Thin Solid Films, Vol. 212, No. 1-2, 1992, pp. 267-273.
 D. J. Kester, C. L. Brodbeck, I. L. Singer and A. Kyriakopoulos, “Sliding Wear Behavior of Diamond-Like Nanocomposite Coatings,” Surface and Coatings Technology, Vol. 113, No. 3, 1999, pp. 268-273.
 D. Neerinck, P. Persoone, M. Sercu, A. Goel, D. Kester and D. Bray, “Diamond-Like Nanocomposite Coatings (a-C:H/a-Si:O) for Tribological Applications,” Diamond and Related Materials, Vol. 7, No. 2-5, 1998, pp. 468-471. http://dx.doi.org/10.1016/S0925-9635(97)00201-X
 W. J. Yang, T. Sekino, K. B. Shim, K. Niihara and K. H. Auh, “Microstructure and Tribological Properties of SiOx/DLC Films Grown by PECVD,” Surface and Coatings Technology, Vol. 194, No. 1, 2005, pp. 128-135.
 M. Y. Chen, X. Lin, V. P. Dravid, Y. W. Chung, M. S. Wong and W. D. Sproul, “Growth and Characterization of C-N Thin Films,” Surface and Coatings Technology, Vol. 54-55, Pt. 2, 1992, pp. 360-364.
 H. L. Bai and E. Y. Jiang, “Improvement of the Thermal Stability of Amorphous Carbon Films by Incorporation of Nitrogen,” Thin Solid Films, Vol. 353, No. 1-2, 1999, pp. 157-165.
 D. F. Franceschini, C. A. Acheter and F. L. Freire, “Internal Stress Reduction by Nitrogen Incorporation in Hard Amorphous Carbon Thin Films,” Applied Physics Letters, Vol. 60, No. 26, 1992, pp. 3229-3231.
 C. Jongwannasiri, N. Moolsradoo, A. Khantachawana, P. Kaewtatip and S. Watanabe, “The Comparison of Biocompatibility Properties between Ti Alloys and Fluorinated Diamond-Like Carbon Films,” Advances in Materials Science and Engineering, Vol. 2012, 2012, Article ID: 724126. http://dx.doi.org/10.1155/2012/724126
 M. A. Capano, N. T. McDevitt, R. K. Singh and F. Qian, “Characterization of Amorphous Carbon Thin Films,” Journal of Vacuum Science and Technology A, Vol. 14, No. 2, 1996, pp. 431-435.
 J. Qi, J. B. Luo, S. Z. Wen, J. Wang and W. Z. Li, “Mechanical and Tribological Properties of Non-Hydrogenated DLC Films Synthesized by IBAD,” Surface and Coatings Technology, Vol. 128-129, 2000, pp. 324-328.
 D. Beeman, J. Silverman, R. Lynds and M. R. Anderson, “Modeling Studies of Amorphous Carbon,” Physical Review B, Vol. 30, No. 2, 1984, pp. 870-875.
 L. Y. Chen and F. C.-N. Hong, “Surface Tension Studies of (Si,N)-Containing Diamond-Like Carbon Films Deposited by Hexamethyldisilazane,” Diamond and Related Materials, Vol. 12, No. 3-7, 2003, pp. 968-973.
 F. L. Freire Jr., G. Mariotto, R. S. Brusa, A. Zecca and C. A. Achete, “Structural Characterization of Amorphous Hydrogenated Carbon and Carbon Nitride Films Deposited by Plasma-Enhanced CVD,” Diamond and Related Materials, Vol. 4, No. 4, 1995, pp. 499-502.
 W. J. Yang, Y.-H. Choa, T. Sekino, K. B. Shim, K. Niihara and K. H. Auh, “Thermal Stability Evaluation of Diamond-Like Nanocomposite Coatings,” Thin Solid Films, Vol. 434, No. 1-2, 2003, pp. 49-54.
 S. H. Yang, H. Kong, K.-R. Lee, S. Park and D. E. Kim, “Effect of Environment on the Tribological Behavior of Si Incorporated Diamond-Like Carbon Films,” Wear, Vol. 252, No. 1-2, 2002, pp. 70-79.
 B. Saha, E. Liu, S. B. Tor, N. W. Khun, D. E. Hardt and J. H. Chun, “Replication Performance of Si-N-DLC-Coated Si Micro-Molds in Micro-Hot-Embossing,” Journal of Micromechanics and Microengineering, Vol. 20, No. 4, 2010, pp. 1-8.