MSA  Vol.4 No.8 A , August 2013
The Study of Different Structuring Techniques for Creation of Non-Evaporable Getters
ABSTRACT

The results of observation of different structuring techniques of thin metal layers applied in micro system technologies are presented. The Ti V getter films formed by magnetron sputtering have been explored using scanning electron and atomic-force microscopy, Brunauer-Emmett-Teller method, thermogravimetric analysis and fractal geometry. The film sorption capacity for hydrogen given by thermogravimetry was of 7.7 m3·Pa·g-1. To estimate the effective surface area, the fractal geometry tools were used and the calculated value of the specific surface area was about 155 m2/m3. The second object under investigation was a structure composed of micro- and mesoporous silicon and copper layer deposited electrochemically on the pore walls. Porous silicon when coupled with a reactive metal or alloy is expected to be an effective getter for micro system techniques. The use of porous silicon and specific conditions of depositions allows to form the structure of complex fractal type with a specific surface area of 167 m2/cm3.


Cite this paper
A. Boyko, D. Gaev, S. Timoshenkov, Y. Chaplygin and V. Petrov, "The Study of Different Structuring Techniques for Creation of Non-Evaporable Getters," Materials Sciences and Applications, Vol. 4 No. 8, 2013, pp. 57-61. doi: 10.4236/msa.2013.48A007.
References
[1]   R. Ramesham and R. C. Kullberg, “Review of Vacuum Packaging and Maintenance of MEMS and the Use of Getters Therein,” Journal of Micro/Nanolithography, Vol. 8, No. 3, 2009, Article ID: 031307. doi:10.1117/1.3158064

[2]   A. Corazza and R. C. Kullberg, “Vacuum Maintenance in Hermetically Sealed MEMS Packages,” Proceedings of SPIE 3514, Micromachined Devices and Components IV, Santa Clara, 20 September 1998, pp. 82-90. doi:10.1117/12.323921

[3]   D. Sparks, S. Massoud-Ansari and N. Najafi, “Reliable Vacuum Packaging Using NanoGetters and Glass Frit Bonding,” Proceedings of SPIE 5343, Reliability, Testing, and Characterization of MEMS/MOEMS III, Santa Clara, 24 January 2004. doi:10.1117/12.530414

[4]   R. L. Holtz, V. Provenzano and M. A. Imam, “Overview of Nanophase Metals and Alloys for Gas Sensors, Getters, and Hydrogen Storage,” Nanostructured Materials, Vol. 7, No. 1-2, 1996, pp. 259-264. doi:10.1016/0965-9773(95)00311-8

[5]   A. Prodromides “Non-Evaporable Getter Thin Film Coatings for Vacuum Applications,” EPFL Thesis, Lausanne, 2002, 168 p. doi:10.5075/epfl-thesis-2652

[6]   E. Enqvist, “Synthesis and Characterisation of Non-Evaporable Getter Films Based on Ti, Zr and V,” MS Thesis, Linkopings Universitet, Linkoping, 2012.

[7]   C. Benvenuti, P. Chiggiato, P. Costa Pinto, A. Prodromides and V. Ruzinov, “Influence of the Substrate Coating Temperature on the Vacuum Properties of Ti-Zr-V Non-Evaporable Getter Films,” Vacuum, Vol. 71, No. 1-2, 2003, pp. 307-315. doi:10.1016/S0042-207X(02)00755-8

[8]   C. Benvenuti, P. Chiggiato, P. Costa Pinto, A. Escudeiro Santana, T. Hedley, A. Mongelluzzo, V. Ruzinov and I. Wevers, “Vacuum Properties of TiZrV Non-Evaporable Getter Films,” Vacuum, Vol. 60, No. 1-2, 2001, pp. 57-65. doi:10.1016/S0042-207X(00)00246-3

[9]   P. Granitzer and K. Rumpf, “Porous Silicon: A Versatile Host Material,” Materials, Vol. 3, No. 2, 2010, pp. 943-998. doi:10.3390/ma3020943

[10]   D. Ding, Z. Liu, L. Liu and Z. Li, “A Surface Micromachining Process for Suspended RF-MEMS Applications Using Porous Silicon,” Microsystem Technologies, Vol. 9, No. 6-7, 2003, pp. 470-473. doi:10.1007/s00542-002-0266-7

[11]   W. Mohammad, Ch. Wilson and V. Kaajakari, “Introducing Porous Silicon as a Getter using the Self Aligned Maskless Process to Enhance the Quality Factor of Packaged MEMS Resonators,” 2011 Joint Conference of the IEEE International, San Francisco, 2-5 May 2011, pp. 1-4. doi:10.1109/FCS.2011.5977875

[12]   A. A. Polunina, “Experimental Determination of the Fine Mechanisms of Absorption of Hydrogen with Titanium to Expand the Range of Performance of Porous Getters,” PhD Thesis, MSIEM, Moscow, 2008.

[13]   S. Brunauer, “The Adsorption of Gases and Vapors,” Vol. 1, Princeton University press, Princeton, 1945.

[14]   B. B. Mandelbrot, “The Fractal Geometry of Nature,” W. H. Freeman and Company, New York, 1982, p. 468.

[15]   N. A. Torkhov, V. G. Bozhkova, I. V. Ivonin and V. A. Novikov, “Determination of the Fractal Dimension for the Epitaxial n-GaAs Surface in the Local Limit,” Semiconductors, Vol. 43, No. 1, 2009, pp. 33-41. doi:10.1134/S1063782609010084

 
 
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