A Dependence of Crystallinity of In2O3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere
ABSTRACT
A difference in crystallinity of In2O3 thin films on sapphire substrates by heat treatment of indium films was reported. Indium films were heated in an inert atmosphere or in air until they reached a specified temperature and then oxidized in air at much higher temperatures. Crystallinity of the In2O3 thin film which was heat-treated in air from room temperature was quite poor. On the other hand, narrow X-ray rocking curves of the In2O3 films were obtained when the temperature was increased in an inert atmosphere to a specified tem-perature.
A difference in crystallinity of In2O3 thin films on sapphire substrates by heat treatment of indium films was reported. Indium films were heated in an inert atmosphere or in air until they reached a specified temperature and then oxidized in air at much higher temperatures. Crystallinity of the In2O3 thin film which was heat-treated in air from room temperature was quite poor. On the other hand, narrow X-ray rocking curves of the In2O3 films were obtained when the temperature was increased in an inert atmosphere to a specified tem-perature.
Cite this paper
nullY. Sato, F. Otake and H. Hatori, "A Dependence of Crystallinity of In2O3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere," Journal of Modern Physics, Vol. 1 No. 6, 2010, pp. 360-363. doi: 10.4236/jmp.2010.16051.
nullY. Sato, F. Otake and H. Hatori, "A Dependence of Crystallinity of In2O3 Thin Films by a Two-Step Heat Treatment of Indium Films on the Heating Atmosphere," Journal of Modern Physics, Vol. 1 No. 6, 2010, pp. 360-363. doi: 10.4236/jmp.2010.16051.
References
[1] S. Nakamura, “III-V Nitride-Based Light-Emitting Di-odes,” Diamond and Related Materials, Vol. 5, No. 3-5, 1996, pp. 496-500. [2] D. B. Fraser, “Sputter-Deposited Films for Display De-vices,” Thin Solid Films, Vol. 13, No. 2, 1972, pp.407-412. [3] C. Wei-Hsu, Y. Kuo-Yi, L. Shao-Cian, G. Jyh-Rong, N. Cuo-Yo and L. Shih-Chang, “On the Physical Properties of In2O3 Films Prepared by Atomic Layer Deposition Using Tri-methyl-Indium and Nitrous Oxide,” Proceed-ings INEC 2010-2010 3rd International Nanoelectronics Conference, Hong Kong, January 2010, pp.791-792. [4] R. K. Gupta, D. Brown, K. Ghosh, S. R. Mishra and P. K. Kahol, “Magneto-Transport Properties of Gd-doped In2O3 Thin Films,” Materials Research Society Sympo-sium Proceedings, Vol. 1032, 2008, pp.77-81. [5] C. Lung-Chien, L. Wen-How, L. Ray-Ming, S. Hue-Tang and C. Hung-Chang, “Optical Properties of In2O3 Oxi-dized from InN Deposited by Reactive Magnetron Sput-tering,” Applied Surface Science, Vol. 252, No. 24, Oc-tober 2006, pp. 8438-8441. [6] JCPDS ed., “Powder Diffraction File,” International Cen-tre for Diffraction Data, 1993. [7] H. Hatori, M. Arai, S. Igarashi, K. Ito, S. Kikuchi and Y. Sato, “Preparations of CdTe Thin Films on Sapphire Sub-strates Having Several Conducting Layers,” Proceedings of the 2010 IEICE General Conference, Sendai, March 2010, p. 18. [8] J. B. MacChesney, P.M. Bridenbaugh and P. B. O’Connor, “Thermal Stability of Indium Nitride at Ele-vated Temperatures and Nitrogen Pressures,” Materials Research Bulletin, Vol. 5, No. 9, 1970, pp. 783-792.
[1] S. Nakamura, “III-V Nitride-Based Light-Emitting Di-odes,” Diamond and Related Materials, Vol. 5, No. 3-5, 1996, pp. 496-500. [2] D. B. Fraser, “Sputter-Deposited Films for Display De-vices,” Thin Solid Films, Vol. 13, No. 2, 1972, pp.407-412. [3] C. Wei-Hsu, Y. Kuo-Yi, L. Shao-Cian, G. Jyh-Rong, N. Cuo-Yo and L. Shih-Chang, “On the Physical Properties of In2O3 Films Prepared by Atomic Layer Deposition Using Tri-methyl-Indium and Nitrous Oxide,” Proceed-ings INEC 2010-2010 3rd International Nanoelectronics Conference, Hong Kong, January 2010, pp.791-792. [4] R. K. Gupta, D. Brown, K. Ghosh, S. R. Mishra and P. K. Kahol, “Magneto-Transport Properties of Gd-doped In2O3 Thin Films,” Materials Research Society Sympo-sium Proceedings, Vol. 1032, 2008, pp.77-81. [5] C. Lung-Chien, L. Wen-How, L. Ray-Ming, S. Hue-Tang and C. Hung-Chang, “Optical Properties of In2O3 Oxi-dized from InN Deposited by Reactive Magnetron Sput-tering,” Applied Surface Science, Vol. 252, No. 24, Oc-tober 2006, pp. 8438-8441. [6] JCPDS ed., “Powder Diffraction File,” International Cen-tre for Diffraction Data, 1993. [7] H. Hatori, M. Arai, S. Igarashi, K. Ito, S. Kikuchi and Y. Sato, “Preparations of CdTe Thin Films on Sapphire Sub-strates Having Several Conducting Layers,” Proceedings of the 2010 IEICE General Conference, Sendai, March 2010, p. 18. [8] J. B. MacChesney, P.M. Bridenbaugh and P. B. O’Connor, “Thermal Stability of Indium Nitride at Ele-vated Temperatures and Nitrogen Pressures,” Materials Research Bulletin, Vol. 5, No. 9, 1970, pp. 783-792.