The epitaxial relationships of lattices and crystalline qualities of LSMO/ZnO/sapphire double-hetero systems were thoroughly analyzed using X-ray diffraction techniques with a modern high resolution XRD system. It was revealed that the epitaxial growth of the LSMO (110) phase was promoted under higher temperature accompanying the suppression of other competitive growth of the LSMO (001) and (111) phases. Supplying the plasma oxygen accelerated the suppression of the LSMO (111) phase. The complex epitaxial orientational relationships in these three growth modes were revealed from the precise analyses with the high resolution out-of-plane XRD and the in-plane XRD measurements, pole figure measurements, and reciprocal space mappings measurements, as [112ˉ](111)LSMO//[11ˉ00](0001)ZnO//[112ˉ0](0001)Sap, [110ˉ](111LSMO)//[11ˉ00](0001)Zno//[112ˉ0](0001)Sap, and (001)LSMO//[11ˉ00](0001)Zno//[112ˉ0](0001)Sap. The validity of this model for the epitaxial orientational relationships in LSMO/ZnO/sapphire double heteroepitaxial layers was confirmed identically with the data ana- lyses of the out-of-plane wide-range Reciprocal Space Mapping using the 2-dimensional X-ray detector.
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