Photothermal deflection is widely used to study defects in materials. Both high spatial resolution and high sensitivity are required to detect them. In order to improve the theoretical model in the case of uniform heating (one dimensional heat treatment) we have chosen to heat the sample by a halogen lamp. The sample which contains a known surface and subsurface defects is first covered by a thin graphite layer and placed in air. The sample fixed on a vertical holder is able to move in the x and y directions thanks a two stepper motors. The measurement showed excellent agreement between experimental and simulation results.
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