ABSTRACT A design synthesis technique based on sensitivity for Micro-Electro-Mechanical Systems (MEMS) proposed. This new technique can be called Sensitivity-Based Direct Solution Algorithm (DSA) of design synthesis for MEMS with expected performance. Design synthesis with expected performance is regarded as a reverse problem of MEMS analysis. Behavior equation group can be educed from analysis equations. Solving the behavior equation group only need L design variables, L is number of desired behaviors. This behavior equation group can be solved using any solution algorithm of non-linear equation group. Newton Iteration Method based on sensitivity is adopted. Comparing with Genetic Optimization Algorithm (GA) and Simulated Annealing Optimization Algorithm (SA), computational workload of DSA is greatly decreased. For instance, synthesis computation of a meandering resonator only needs 4 iterations (17 analyses); computational time is decreased from 7~8 hours to less than 30 seconds.
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