The characteristics of a kind of comb-drive electrostatic actuated micro-gripper are tested. The test platform using a microscope-CCD-computer, the state information of the micro-gripper obtained by data acquisition and image processing, voltage-displacement characteristic curve is obtained and the mathematical equation is established. The analysis of the characteristic equation has shown the consistency and rationality of the theoretical design and the experimental results. The main factors that cause the difference between the theoretical design and the actual test performance are analyzed, and the design method and experimental results is obtained for the micro-gripper in the field of micro-assembly.
Cite this paper
Yang, P. , Li, Y. , Li, Y. and Li, Q. (2017) Experimental Study on Electrostatically Actuated Micro-Gripper Based on Silica Process. World Journal of Engineering and Technology, 5, 126-133. doi: 10.4236/wjet.2017.54B014.
 Millet, O., Bernardoni, P., Régnier, S., Bidaud, P., Tsitsiris, E., Collard, D. and Buchaillot, L. (2004) Electrostatic Actuated Micro Gripper Using an Amplification Mechanism. Sensors and Actuators A: Physical, 114, 371-378.
 Tang, W.C., Nguyen, T.H. and Howe, R.T. (1989) Laterally Driven Polysiclion Resonant Structures. Proc. IEEE Micro Electro Mechanical Systems Workshop, February 1989, 53-59.
 Legtenberg, R., Groeneveld, A.W. and Elwenspoek, M. (1996) Comb-Drive Actuators for Large Displacements. Journal of Micromechanics and Microengineering, 6, 320. https://doi.org/10.1088/0960-1317/6/3/004
 Reaz, M.B.I., Hussain, M.S. and Mohd-Yasin, F. (2006) Techniques of EMG Signal Analysis: Detection, Processing, Classification and Applications. Biological Procedures Online, 8, 11-35. https://doi.org/10.1251/bpo115
 Bhushan, B. and Li, X.D. (1997) Micromechanical and Tribological Characterization of Doped Single-Crystal Silicon and Polysilicon Films for Microe-lectromechanical Systems Devices. J. Mater. Res, 1997, 54-63.
 Wu, J.G. and Bin, H.Z. (2007) Dimensional Inspecting System of Thin Sheet Parts Based on Machine Vision. Optics and Precision Engineering, 1, 22.